产品介绍

Production and processing

wafer cassette (wafer carrier)
材质规格: PP , PVDF , PFA / 5" , 6" , 8"
contact ring
材质规格: PEEK + viton coating / 8" , 12"
chuck pin
材质规格: PVDF , ECTFE /8" , 12"
Rev.B & Rev.C
材质规格: PEEK / 12"
robot plate
材质规格: PEEK , ceramics / 8", 12"
wafer support
材质规格: AL + PEEK / 12"
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