wafer cassette (wafer carrier)
| Material Specification: | PP , PVDF , PFA / 5" , 6" , 8" |
contact ring
| Material Specification: | PEEK + viton coating / 8" , 12" |
chuck pin
| Material Specification: | PVDF , ECTFE /8" , 12" |
Rev.B & Rev.C
| Material Specification: | PEEK / 12" |
robot plate
| Material Specification: | PEEK , ceramics / 8", 12" |
wafer support
| Material Specification: | AL + PEEK / 12" |
