wafer cassette (wafer carrier)
![](images/product/pro-1-1.jpg)
材質規格: | PP , PVDF , PFA / 5" , 6" , 8" |
contact ring
![](images/product/pro-1-2.jpg)
材質規格: | PEEK + viton coating / 8" , 12" |
chuck pin
![](images/product/pro-1-3.jpg)
材質規格: | PVDF , ECTFE /8" , 12" |
Rev.B & Rev.C
![](images/product/pro-1-4.jpg)
材質規格: | PEEK / 12" |
robot plate
![](images/product/pro-1-5.jpg)
材質規格: | PEEK , ceramics / 8", 12" |
wafer support
![](images/product/pro-1-6.jpg)
材質規格: | AL + PEEK / 12" |